JPH0274364U - - Google Patents
Info
- Publication number
- JPH0274364U JPH0274364U JP15316388U JP15316388U JPH0274364U JP H0274364 U JPH0274364 U JP H0274364U JP 15316388 U JP15316388 U JP 15316388U JP 15316388 U JP15316388 U JP 15316388U JP H0274364 U JPH0274364 U JP H0274364U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- rotating shaft
- substrate holder
- integrally
- heater
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Vapour Deposition (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15316388U JPH0274364U (en]) | 1988-11-25 | 1988-11-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15316388U JPH0274364U (en]) | 1988-11-25 | 1988-11-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0274364U true JPH0274364U (en]) | 1990-06-06 |
Family
ID=31428754
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15316388U Pending JPH0274364U (en]) | 1988-11-25 | 1988-11-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0274364U (en]) |
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1988
- 1988-11-25 JP JP15316388U patent/JPH0274364U/ja active Pending